发光学报2017，Vol.38Issue(8)：1033-1038,6.DOI:10.3788/fgxb20173808.1033
Pd颗粒表面修饰ZnO纳米线阵列的制备及其气敏特性
Preparation and Gas Sensing Characteristics of ZnO Nanowire Arrays Surface-decorated by Pd Particles
摘要
Abstract
ZnO nanowire (NW) arrays were synthesized by chemical vapor deposition (CVD) method on SiO2/Si substrate.The Pd films with different sputtering time (0-150 s) were uniformly deposited on the surface of ZnO NWs and converted to Pd particles by annealing treatment at 800 ℃ in Ar gas, and then the gas sensing measurement was performed.The length of the NW is about 15 μm and the diameter is 100-500 nm.For ethanol gas, the optimal working temperature of all gas sensors is 280 ℃.The increase of the sputtering time (from 3 to 10 s) induces the increase of the number and size of Pd particles, and the response of gas sensor raises from 2.0 to 3.6.Further increase of the sputtering time (from 30 to 150 s) leads to significant increase of the size of Pd particles and the formation of the continuous film, resulting in the significant decrease of the response.All the sensors exhibit the best gas selectivity to H2 gas, and the better properties of the response and recovery time and the response stability are obtained.Finally, the influence mechanism of Pd particle surface decoration on the ZnO NW array gas sensors was discussed.关键词
气敏特性/ZnO纳米线/Pd颗粒/表面修饰Key words
gas sensing/ZnO nanowire arrays/Pd particle/surface decoration分类
数理科学引用本文复制引用
杨志博,吕有明,曹培江,韩舜,刘新科,柳文军,贾芳,曾玉祥,许望颖,朱德亮..Pd颗粒表面修饰ZnO纳米线阵列的制备及其气敏特性[J].发光学报,2017,38(8):1033-1038,6.基金项目
国家自然科学基金(51371120,51302174,61504083) （51371120,51302174,61504083）
广东省自然科学基金(2016A030313060) （2016A030313060）
深圳市科技计划(JCYJ20150324141711655) （JCYJ20150324141711655）
深圳大学学生创新发展基金(PIDF-2016ZR021)资助项目 Supported by National Natural Science Foundation of China (51371120, 51302174, 61504083) （PIDF-2016ZR021）
National Natural Science Foundation of Guangdong Province(2016A030313060) （2016A030313060）
Science and Technology Plan of Shenzhen(JCYJ20150324141711655) （JCYJ20150324141711655）
Student Innovation Development Fund of Shenzhen University (PIDF-2016ZR021) （PIDF-2016ZR021）
