红外与毫米波学报2017，Vol.36Issue(3)：276-279,301,5.DOI:10.11972/j.issn.1001-9014.2017.03.005
使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质
Temperature-dependent optical properties of AlN films characterized by spectroscopic ellipsometry
摘要
Abstract
We investigated the optical properties of AlN films with different thicknesses grown on sapphire by spectroscopic ellipsometry at different temperature.Based on a Tauc-Lorentz dispersion model,thickness and optical constants (the refractive index n,the extinction coefficient k) of AlN films were extracted by fitting the experimental data.Our results show that the refractive index of thicker AlN film possesses bigger values.Similar to the previous report,it was also found that the refractive index,the extinction coefficient and band gap of AlN films shift monotonously to lower energies (a redshift) with temperature increasing.Moreover,with rising temperature,varying the thicknesses of the films exhibits little influence on the shrinkage of bandgap but slight influence on the changes of the refractive index.关键词
氮化铝/椭偏仪/厚度/温度Key words
AlN/Spectroscopic Ellipsometry/thickness/temperature分类
数理科学引用本文复制引用
林书玉,吴峰,陈长清,梁毅,万玲玉,冯哲川..使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质[J].红外与毫米波学报,2017,36(3):276-279,301,5.基金项目
National Natural Science Foundation of China (61367004,11604058),Guangxi Key Laboratory for Relativistic Astrophysics-Guangxi Natural Science Creative Team funding (2013GXNSFFA019001),Guangxi Natural Science Foundation (2016GXNSFBA380244) （61367004,11604058）
