金刚石与磨料磨具工程2017，Vol.37Issue(2)：11-15,5.DOI:10.13394/j.cnki.jgszz.2017.2.0003
修整技术及提高固结磨料研磨垫自修整性的研究
Investigation on pad's conditioning technology and improving self-conditioning of fixed abrasive pad
摘要
Abstract
The surface features of abrasive pad deform during chemical mechanical polishing and as a result the polishing ability of the pad is dramatically reduced.Pad conditioning improves the pad surface profile and consequently the wafer profile.In addition,it reduces defects on pad surface and prolongs its service life.The conditioning technologies of fixed-abrasive pad are introduced in this paper,which can be divided into two types,namely non-self-conditioning and self-conditioning.High pressure water jet,ultrasonic vibration and diamond dresser etc are non-self-conditioning methods.The methods of improving the self-conditioning of hydrophilic fixed polishing pad are emphasized.Choosing proper slurry,adding soluble and optimizing the lapping process parameters can benefit the self-conditioning process.关键词
修整技术/自修整/金刚石磨料/亲水性固结磨料研磨垫Key words
conditioning technology/self-conditioning/diamond abrasive/hydrophilic fixed abrasive pad分类
矿业与冶金引用本文复制引用
居志兰,朱永伟,张福豹..修整技术及提高固结磨料研磨垫自修整性的研究[J].金刚石与磨料磨具工程,2017,37(2):11-15,5.基金项目
江苏省高校自然科学基金(16KJD460006) （16KJD460006）
江苏省重点研发项目(BE2016116) （BE2016116）
南通市应用基础研究项目(GY12016056). （GY12016056）
