重庆邮电大学学报（自然科学版）2017，Vol.29Issue(4)：494-499,6.DOI:10.3979/j.issn.1673-825X.2017.04.011
基于声表面波谐振器的三维纳米团簇敏感薄膜关键技术研究
Research on key technologies of 3D nano cluster sensitive film based on SAW resonator
摘要
Abstract
This research attempts to design a new type of surface acoustic wave (SAW) gas sensor that integrates both the three-dimensional nanostructure technology and the SAW technology and thereby makes use of their advantages in sensitivity and specific surface area, respectively.By taking advantage of the resonant surface acoustic wave(SAWR)'s high Q-factor and low insertion loss characteristic, this paper mainly focuses on the design of the SAW chip and modification of the nanowires structure.Finally,through pumping the Sarin and HD gas into the sample pool of the 3D nano-SAW gas sensor with Back-Propagation Network recognize algorithm, As shown by the experiment results, the overall distinguishable rate is more than 90%, and the 3D nano-SAW gas sensor is superior to traditional sensing devices concerning the sensitivity, identification accuracy, and response speed.关键词
声表面波/纳米线簇/气体传感器/神经网络识别算法Key words
surface acoustic wave (SAW)/nanowires/gas sensor/BP-ANN分类
信息技术与安全科学引用本文复制引用
漆晶,文玉梅,李平..基于声表面波谐振器的三维纳米团簇敏感薄膜关键技术研究[J].重庆邮电大学学报（自然科学版）,2017,29(4):494-499,6.基金项目
The Science and Technology Project Affiliated to the Education Department of Chongqing Municipality(KJ1500433) （KJ1500433）
