电源技术2017,Vol.41Issue(7):1025-1027,3.
P型微晶硅在柔性太阳电池中的应用研究
Application of P-μ c-Si:H thin film material to thin film solar cells on flexible substrate
靳果 1袁铸 1胡居涛2
作者信息
- 1. 河南工业职业技术学院机电自动化学院,河南南阳473000
- 2. 江苏武进汉能薄膜太阳能有限公司,江苏常州213100
- 折叠
摘要
Abstract
B(CH3)3 was used as dopant to deposit the P-type microcrystalline(P-μc-Si:H) films.To investigate these materials,the major processing parameters of silane concentration,B(CH3)3 doping ratio,reaction pressure and gas flow rate were primarily optimized by the method of orthogonal experiment.These materials were deposited on glass with the thickness of about 80 nm and the influences of above parameters on the materials' electrical and microstructure character were investigated by tested dark conductivity,XRD and Raman.The higher quality materials were further investigated on the base of former study.Finally,the beneficial effect of our electrical findings was used to fabricate a-Si:H solar cell on PEN flexible substrate with an initial efficiency of 6%.关键词
P型微晶硅薄膜/B(CH3)3/柔性衬底/非晶硅太阳电池Key words
P-μc-Si/H, B(CH3)3/flexible substrate/a-Si:H solar cell分类
信息技术与安全科学引用本文复制引用
靳果,袁铸,胡居涛..P型微晶硅在柔性太阳电池中的应用研究[J].电源技术,2017,41(7):1025-1027,3.