激光技术2017，Vol.41Issue(4)：479-483,5.DOI:10.7510/jgjs.issn.1001-3806.2017.04.004
硅基光栅耦合封装结构的优化设计
Optimized design of grating coupling packaging structure on silicon substrate
摘要
Abstract
In order to improve the coupling efficiency and increase the tolerance range of grating coupling packaging structure on silicon substrate, the characteristics of grating coupling structure were analyzed theoretically and verified by simulation based on finite-difference time-domain method.After studying the main influence factors of the coupling efficiency, the basic grating coupling structure was improved without changing the parameters of the grating.A grating coupling structure with lenses was proposed.The results show that, after the lenses are added, coupling efficiency, angle tolerance and bandwidth are optimized through simulation.The coupling efficiency is increased to 73.809% with an incident wavelength in 1550nm when adding the reflectors on the substrate.The analysis results provide a reference for the design of the packaging structure of the grating coupling.关键词
光栅/封装结构/时域有限差分法/耦合效率/透镜Key words
gratings/packaging structure/finite-difference time-domain method/coupling efficiency/lens分类
信息技术与安全科学引用本文复制引用
宋曼谷,曹立强,刘丰满,薛海韵,孙瑜,李宝霞..硅基光栅耦合封装结构的优化设计[J].激光技术,2017,41(4):479-483,5.基金项目
国家自然科学基金青年基金资助项目(61306136) （61306136）
