机械科学与技术2017，Vol.36Issue(8)：1155-1160,6.DOI:10.13433/j.cnki.1003-8728.2017.0802
带有旁路微流道的改进型电共轭流体射流发生器
Improving Electro-conjugate Fluid Jet Generator with Bypass Micro-channel
摘要
Abstract
In order to solve the serious pressure-drop problem of a common ECF (electro-conjugate fluid) jet generator when its output flow is small and also to improve its output performance,the structural optimization of the flow channel layer of the ECF jet generator is conducted.First,based on the principles of ion drag pumping and conduction pumping,the improved ECF jet generator's design is theoretically analyzed.Then,both common and improved ECF jet generators with less defects and good appearance are fabricated successfully based on MEMS technology.Finally,the experiments for the comparative verification of common and improved ECF jet generators are performed.The experimental results show that the ECF jet generators with bypass micro-channel have a stronger output performance,which verifies the feasibility of our design.关键词
电共轭流体/射流发生器/旁路微流道/MEMS/对比试验Key words
electro-conjugate fluid/jet generator/structural optimization/MEMS/experiments分类
机械制造引用本文复制引用
王海波,张如照..带有旁路微流道的改进型电共轭流体射流发生器[J].机械科学与技术,2017,36(8):1155-1160,6.基金项目
国家自然科学基金项目(51205329)资助 （51205329）
