人工晶体学报2017,Vol.46Issue(7):1411-1414,4.
一种采用光学比较测角仪测量碲化镉晶体平行度的方法
A Method to Measure Parallelism of CdTe Crystal Using Precision Goniometer
姜黎霞 1商继芳 2李清连2
作者信息
- 1. 北京联合大学基础部,北京 100101
- 2. 南开大学物理科学学院,天津 300071
- 折叠
摘要
Abstract
The CdTe crystals were processed optically and the parallelism was measured by using two precision goniometers with measurement accuracy of 1″ and a optical flat with parallelism better than 1″, the measured parallelism was compared with that of CaF2 crystal which was processed together with CdTe crystals.The parallelism of CaF2 crystal was measured by a laser plane interferometer.Additionally, the source and magnitude of error in this method were analyzed.The results show that the difference of the parallelism of CdTe and CaF2 is less than 3″.The error mainly come from the measurement error of precision goniometer and the parallelism error of optical flat, and the total error is no more than 5″,which can meet the precision require of parallelism measurement for CdTe crystal.关键词
碲化镉/平行度/光学比较测角仪/误差分析Key words
CdTe/parallelism/precision goniometer/error analysis分类
数理科学引用本文复制引用
姜黎霞,商继芳,李清连..一种采用光学比较测角仪测量碲化镉晶体平行度的方法[J].人工晶体学报,2017,46(7):1411-1414,4.