粉末冶金技术2017，Vol.35Issue(4)：284-292,9.DOI:10.19591/j.cnki.cn11-1974/tf.2017.04.008
高品质钼靶材低压等离子喷涂成形技术研究
Study on the high-quality molybdenum target fabricated by low pressure plasma spraying
摘要
Abstract
Tabular and rotary molybdenum targets were fabricated by low pressure plasma spraying (LPPS). Porosity, oxygen content by mass, microstructure, and mechanical properties including micro-hardness and ultimate tensile strength (UTS) of molybdenum targets were investigated. In addition, the magnetron sputtering experiment of LPPS molybdenum targets was taken place. In the results, a lamellar structure consisting of vertical columnar grains and compact interlamellar contacts was found in LPPS Mo deposits. Porosity, oxygen content by mass, micro-hardness, and UTS of LPPS Mo target are about 1.1%, 0.18%, HV0.025361.8, and 373.2 MPa, respectively. All abovementioned properties of LPPS Mo targets are better than those of atmospheric plasma sprayed (APS) ones. Smooth, compact, and continuous Mo thin film with the thickness of about 700 nm can be deposited by magnetron sputtering from LPPS Mo target. X-ray diffraction (XRD) spectra show that the Mo thin film in body centered cubic structure grows preferentially along (110) direction. Rapid sputtering and uniform reduction on the surface of molybdenum targets are taken place for the uniform bombardment of sputter ion during magnetron sputtering. The sputtering surface is smooth with the nano-scale sputtering spits being formed.关键词
低压等离子喷涂/钼靶材/近净成形/力学性能/磁控溅射Key words
low pressure plasma spray/molybdenum target/near-net-shape/mechanical properties/magnetron sputtering分类
矿业与冶金引用本文复制引用
王跃明,闵小兵,熊翔,刘东华,王芬,闫志巧..高品质钼靶材低压等离子喷涂成形技术研究[J].粉末冶金技术,2017,35(4):284-292,9.基金项目
湖南省自然科学湘潭联合基金资助项目(2016JJ5029) （2016JJ5029）
湖南省军民融合产业发展专项资金资助项目(B116J1) （B116J1）
中国博士后科学基金第53批面上资助项目(2013M531804) （2013M531804）
中国博士后科学基金第7批特别资助项目(2014T70784) （2014T70784）
武汉理工大学材料复合新技术国家重点实验室开放基金资助项目(2015-KF-14) （2015-KF-14）
华中科技大学材料成形与模具技术国家重点实验室开放基金资助项目(P2016-20) （P2016-20）
中南大学粉末冶金国家重点实验室开放基金资助项目(2014-SKL-13) （2014-SKL-13）
华南理工大学国家金属材料近净成形工程技术研究中心开放基金资助项目(2016003) （2016003）
广东省金属强韧化技术与应用重点实验室开放基金资助项目(GKL201610) （GKL201610）
湖南省教育厅科学研究一般项目资助项目(13C314) （13C314）
