光学精密工程2017，Vol.25Issue(7)：1727-1737,11.DOI:10.3788/OPE.20172507.1727
基于光学傅里叶变换的周期性微结构缺陷检测
Detection of periodic microstructure defect based on optical Fourier transform
摘要
Abstract
In order to achieve defect detection of periodic microstructure in a large field of view,a defect detection method based on optical Fourier transform was proposed and relevant experimental system was established.Firstly,the periodic microstructure imaging was subject to two-dimensional fast Fourier transform for deriving spatial frequency spectrum of periodic microstructure.Then,a spot among first-order diffraction spots was chosen to be processed by fast Fourier transform for obtaining the amplitude histogram.According to the mutation location in the amplitude histogram,defect positions were determined.The deviation of defects was proportional to the intensity of the amplitude mutations.The experimental result shows that the system can provide a measurement field of view of 1.5 mm× 1.5 mm and the measurement resolution over 0.5 μm,improving the detection field greatly on the premise of an adequate resolution.The proposed method enables fast,efficient and convenient defect detection of periodic microstructure in a large field of view.关键词
傅里叶变换/大视场/周期性微结构/缺陷检测Key words
Fourier transform/wide field/periodic microstructure/defect detection分类
数理科学引用本文复制引用
董明利,李波,张帆,孙鹏..基于光学傅里叶变换的周期性微结构缺陷检测[J].光学精密工程,2017,25(7):1727-1737,11.基金项目
国家自然科学基金资助项目(No.61605011) （No.61605011）
教育部创新团队项目 （）
