光学精密工程2017，Vol.25Issue(7)：1764-1770,7.DOI:10.3788/OPE.20172507.1764
大尺寸光学元件在位动态干涉拼接测量系统
On-line dynamic interference stitching measurement system for large optical elements
摘要
Abstract
In order to realize on-line and in-situ measurement of high precision optical elements in workshop,a dynamic interference stitching system for large optical elements measured in general environment was investigated.The system was consisted of a dynamic interferometer,twodimensional mobile platform,control system and stitching software.A stitching experiment for an 200 mm× 300 mm optical element was completed by this system in general environment,based on error averaging stitching algorithm.Moreover,the stitching results were analyzed.Comparing the results between stitching measurement and full aperture measurement,the relative deviations of PV,RMS and Power are 3.1 ％,1.6 ％ and 2.1％ respectively.The system lays a foundation for the online and in-situ measurement system for large optical elements in the workshop environment.关键词
光学检测/子孔径拼接/动态干涉仪/大口径光学元件/误差均化拼接Key words
optical testing/sub-aperture stitching/dynamic interferometer/large optical elements/error average stitching分类
机械制造引用本文复制引用
于瀛洁,齐特,武欣..大尺寸光学元件在位动态干涉拼接测量系统[J].光学精密工程,2017,25(7):1764-1770,7.基金项目
国家重大科技专项(No.2013ZX04006011-217) （No.2013ZX04006011-217）
国家自然科学基金资助项目(No.51175318) （No.51175318）
