光学精密工程2017，Vol.25Issue(7)：1843-1849,7.DOI:10.3788/OPE.20172507.1843
带温度补偿的低温漂石英微机械陀螺接口ASIC设计
ASIC design of micro-mechanical gyro interface of low temperature drift quartz with temperature compensation
摘要
Abstract
Through analyzing operating principle of quartz gyro,interface circuit of closed-loop selfexcited drive and based on principle of low-noise phase sensitive demodulation was designed,and influence of driving force coupling on zero position output was researched to increase environmental adaptability of quartz gyro.Effect of temperature on amplitude of driving force was obtained through researching temperature feature on aspects of air damping and resonant frequency,etc of sensitive header of sensor.Then method of conducting temperature compensation via amplitude of driving force was proposed.Temperature features of interface circuit and influence to zero position output of gyro were analyzed,and operational amplifier unit of constant bandwidth in the whole temperature area was designed to restrain temperature drift due to change of proportion of high-frequency harmonic component in detection signal.The chip was implemented in high voltage N-well CMOS process and interface ASIC with low-temperature drift was achieved.Cyclic test of zero position temperature was conducted on whole machine of quartz gyro in temperature scope of-45℃ ～85℃ to conduct threeorder fitting compensation on zero position output with amplitude of driving force.Zero position temperature drift of whole temperature after compensation was less than 20°/hr(1σ)with short-term stability and output noise respectively as 5°/hr and 0.001°/s//Hz.关键词
石英陀螺/温度补偿/接口ASIC/温度漂移Key words
quartz gyro/temperature compensation/interface ASIC/temperature drift分类
信息技术与安全科学引用本文复制引用
付强,尹亮,陈伟平,刘晓为..带温度补偿的低温漂石英微机械陀螺接口ASIC设计[J].光学精密工程,2017,25(7):1843-1849,7.基金项目
上海航天科技创新基金(No.SAST2015052) （No.SAST2015052）
