光学精密工程2017，Vol.25Issue(8)：2011-2022,12.DOI:10.3788/OPE.20172508.2011
交变光场时空耦合型位移测量系统的研制
Developement of alternating light field space-time coupling type displacement measuring system
摘要
Abstract
Regarding the restriction of precision ruling process difficulty on the measurement precision, a linear space-time coupling displacement measuring system was designed, taking an alternating light field as the measuring medium.The measuring system coupled four orthogonal alternating light fields and four orthogonal sinusoidal light transmitting surface into electrical traveling wave signal, thus achieving high precision displacement measurements.Through analysis of the measuring principle of the system.The theory model and error model of this measurement system were established, and the measuring error characteristic was analyzed in detail by model simulation when time phase and space phase were not orthogonal and mechanical installation was inaccurate respectively.Experiments were conducted for verification of the origins of the first harmonic, the second harmonic and the fourth harmonic.According to which, the measuring equipment was improved and its parameters were optimized.The experiment result shows that the measuring errors of the optimized measuring system are controlled within ±0.4 μm in the measuring range of 180 mm with grating pitch of 0.6 mm.The system avoids precision ruling process of current grating, and has simple structure and easy installation, which provide an excellent approach for optical displacement measurements.关键词
位移测量/交变光场/时空耦合/行波合成/误差分析Key words
displacement measurement/alternating light field/space-time coupling/travelling wave synthesis/error analysis分类
信息技术与安全科学引用本文复制引用
朱革,张超,付敏,潘帅嘉,雷川..交变光场时空耦合型位移测量系统的研制[J].光学精密工程,2017,25(8):2011-2022,12.基金项目
国家自然科学基金资助项目(No.51505053) （No.51505053）
重庆市基础科学与前沿技术研究专项资助(No.cstc2015jcyjA40022) （No.cstc2015jcyjA40022）
重庆市教委科学技术研究项目(No.KJ1500909) （No.KJ1500909）
