光学精密工程2017，Vol.25Issue(8)：2038-2045,8.DOI:10.3788/OPE.20172508.2038
真空热处理对硫化锌薄膜光学与微结构特性的影响
Effects of vacuum annealing on optical and microstructure properties of zinc sulfide thin film
摘要
Abstract
The effect of vacuum annealing on the optical and microstructural properties of zinc sulfide (ZnS) thin films deposited by ion beam evaporation (below 550 ℃) was investigated.The analysis of optical and microstructure characteristics of the thin films show that, the microstructure of ZnS films is cubic-like structure, and has a critical characteristic turning point at a wavelength of 337.5 nm.With the increase of annealing temperature, the variation trend of the extinction coefficient on both sides of the critical wavelength is opposite.The refractive index and physical thickness decreases while the band gap of the film gradually increases.The effect of annealing temperature on the refractive index of ZnS films is slight in the near infrared, and the transition of the extinction coefficient at 350 ℃ is mainly due to the smaller tendency of the grain size.The metallographic analysis indicates that the ZnS films are transformed from cubic-like structure to hexagonal structure, which was consistent with the trend of band gap of the ZnS films.Therefore, the change of the optical properties of the thin film is lead by the microstructure variation of thin films.关键词
ZnS薄膜/折射率/消光系数/真空热处理/晶相结构Key words
ZnS thin film/refractive index/extinction coefficient/vacuum annealing/crystallographic structure分类
数理科学引用本文复制引用
刘华松,姜承慧,李士达,杨霄,季一勤,张锋,陈德应..真空热处理对硫化锌薄膜光学与微结构特性的影响[J].光学精密工程,2017,25(8):2038-2045,8.基金项目
国家自然科学基金资助项目(No.61405145) （No.61405145）
天津市自然科学重点基金资助项目(No.15JCZDJC31900) （No.15JCZDJC31900）
中国博士后科学基金资助项目(No.2015T80115,No.2014M560104) （No.2015T80115,No.2014M560104）
