光学精密工程2017，Vol.25Issue(8)：2046-2056,11.DOI:10.3788/OPE.20172508.2046
改进型量子进化算法在宽带EUV多层膜设计中的应用
Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer
摘要
Abstract
In order to further improve the efficiency and accuracy of quantum evolutionary algorithm (QEA) in the design of broadband Extreme Ultraviolet (EUV) multilayers, the gradient information of evaluation function was applied to improve QEA, and then the improved quantum evolutionary algorithm (IQEA) with defined evolution directions was adopted in the design of broadband multilayers.A comparison between the QEA and IQEA in the design of broadband Mo/Si multilayer was given, and the results show that the IQEA has better efficiencies and higher accuracies.Furthermore, the IQEA can be used to design the multilayer with a population which is smaller than the number of parameters of Mo/Si multilayer.In this research, two kinds of multilayers were designed based on the IQEA, one has a reflectivity of 50% in the incidence angle range from 0° to 18°, and the other allows a reflectivity of 25% in the wavelength range from 13 nm to 15 nm.The theoretical coating designs of broadband EUV multilayers based on IQEA can be an alternative and optimal method for the design of complex non-periodic multilayers.关键词
薄膜光学/多层膜设计/改进型量子进化算法/宽带极紫外多层膜Key words
film optics/design of multilayer coatings/improved quantum evolutionary algorithm/broadband EUV multilayer分类
数理科学引用本文复制引用
匡尚奇,张超,王一名,周祥燕,谢耀..改进型量子进化算法在宽带EUV多层膜设计中的应用[J].光学精密工程,2017,25(8):2046-2056,11.基金项目
国家自然科学基金青年基金资助项目(No.61405189) （No.61405189）
吉林省科技发展计划资助项目(No.20150101019JC （）
20170312024ZG) （）
