光学精密工程2017，Vol.25Issue(8)：2165-2172,8.DOI:10.3788/OPE.20172508.2165
精密转台角分度误差补偿
Compensation of angular indexing error for precision turntable
摘要
Abstract
A compensation method for angular indexing error was introduced based on sparse decomposition to correct the angular indexing error caused by the eccentric and tilt of circular gratings installment in a precision turntable.First, the effect of circular grating installed eccentric and tilt on the angular indexing error was analyzed.Next, according to the characteristics of different orders of error in measuring error of circular grating angle, a compensation model of angular indexing error was built based on the sparse decomposition theory and the harmonic analysis to compensate the angular indexing error of the turntable.Finally, a test platform was established, and the effectiveness of the proposed method was verified to compensate the angular indexing error of a precision turntable.The experimental results show that the proposed method can increase 2 orders of magnitude of the angular indexing accuracy.The maximum value of angular indexing error can be reduced to 0.64" from 90.85" through proposed error compensation method.After error compensation with the method, the accuracy of angle positioning can be remarkably improved, meeting the high-accuracy testing requirements of angular displacement of a precision turntable.关键词
精密转台/角分度误差/稀疏分解/误差补偿Key words
precision turntable/angular indexing error/sparse decomposition/error compensation分类
通用工业技术引用本文复制引用
王福全,王珏,谢志江,刘丰林..精密转台角分度误差补偿[J].光学精密工程,2017,25(8):2165-2172,8.基金项目
国家自然科学基金资助项目(No.61471070) （No.61471070）
国家重大科学仪器设备开发专项(No.2013YQ030629) （No.2013YQ030629）
