西华大学学报（自然科学版）2017，Vol.36Issue(5)：108-112,5.DOI:10.3969/j.issn.1673-159X.2017.05.017
退火温度对碳化硅涂层微观结构与形貌的影响
Influence of Annealing Temperature on Microstructure and Morphology of SiC Coatings
王坤 1王美玲 2刘锦云1
作者信息
- 1. 西华大学材料科学与工程学院,四川 成都 610039
- 2. 中国核动力研究设计院反应堆燃料及材料重点实验室,四川 成都 610041
- 折叠
摘要
Abstract
The SiC coatings of 1. 8 μm were deposited by RF magnetron sputtering on the substrate of Zirconium alloy, and then were annealed at 400℃ ～800℃. The SiC coatings was characterized by the AFM, SEM, and the effect of different temperature on the surface morphology of the coating was disscussed. The structure of SiC coating was analyzed by XRD. The results show that the rough-ness of SiC coating decreased first and then increased with increasing of the annealing temperature from 400℃ to 800℃, the minimum surface roughness 0. 122 μm was got at 600℃; When the annealing temperature was lower than 600℃, SiC coating does not appear crystal transition;When the annealing temperature was higher than 700℃,the amorphous coating turned to crystal coating, the corre-sponding diffraction peaks of SiC appeared in XRD diffraction pattern after annealing at 700℃, and with the increase of annealing tem-perature, the crystallization degree of the coating is further increased.关键词
碳化硅涂层/退火温度/射频磁控溅射/粗糙度Key words
silicon carbide coating/annealing temperature/magnetron sputtering/roughness分类
矿业与冶金引用本文复制引用
王坤,王美玲,刘锦云..退火温度对碳化硅涂层微观结构与形貌的影响[J].西华大学学报（自然科学版）,2017,36(5):108-112,5.
