传感技术学报2017，Vol.30Issue(5)：650-654,5.DOI:10.3969/j.issn.1004-1699.2017.05.003
基于光诱导电化学沉积的金属微电极加工方法
Fabrication of Metal Microelectrode Based on Optically Induced Electrochemical Deposition
摘要
Abstract
Nanomaterials have unique physical and chemical properties,which have shown great potential in nano-electronic devices and nano-biosensors. Based on the two-dimensional nano-material devices,it is necessary to use the metal electrodes to create nano-sensors or field-effect transistor structures. At present,there are several methods to fabricate the metal electrodes such as lithography, focused ion beam ( FIB ) and nanoprinting. However, these methods often require the expensive equipments and are very complicated to operate. We propose a method of for the deposition of micro-electrodes,based on optically-induced metal electrodeposition. By analyzing the experimental parameters ( including the frequency, amplitude, solution concentration and thickness of hydrogenated amorphous silicon layer) ,the optimized deposition conditions of the micro-electrodes were obtained. Then,the prepared micro-electrodes were characterized by the optical microscope, atomic force microscope ( AFM ) and scanning electron microscope( SEM) .关键词
光诱导电化学反应/金属微电极/原子力显微镜/电极沉积Key words
optically-induced electrodeposition/metal microelectorde/AFM/eletrochemical deposition分类
信息技术与安全科学引用本文复制引用
关涛,丛培田,刘柱..基于光诱导电化学沉积的金属微电极加工方法[J].传感技术学报,2017,30(5):650-654,5.基金项目
国家自然科学基金项目( 51461165501,2015/01-2018/12) （ 51461165501,2015/01-2018/12）
