传感技术学报2017，Vol.30Issue(5)：660-666,7.DOI:10.3969/j.issn.1004-1699.2017.05.005
基于SAW器件的微间隙压力监测传感器
SAW Sensors for Monitoring Pressure in Micro-Gaps
摘要
Abstract
Surface acoustic wave(SAW)device can be used for passive wireless communication,which provides a new solution for measurement of physical quantity under special environment such as micro-gaps. A contact stress sensor based on surface acoustic wave delay line is designed. The structure of SAW device is studied, and the sensing scheme of measuring pressure is discussed. According to the design principle,we design a new type of SAW sensors,and stress simulations of piezoelectric substrate are presented by using finite element analysis method. Then the sensors are tested and temperature compensation of SAW sensors is proposed. By exploring the design of SAW sensors,results show that feasibility of measuring pressure in micro-gaps based on SAW is verified.关键词
声表面波/无源无线/微间隙/有限元分析/应力仿真Key words
SAW/passive wireless/micro-gaps/finite element analysis/stress simulations分类
信息技术与安全科学引用本文复制引用
王俊,李媛媛,卢文科..基于SAW器件的微间隙压力监测传感器[J].传感技术学报,2017,30(5):660-666,7.基金项目
上海工程技术大学研究生科研创新项目( E3-0903-16-01182) （ E3-0903-16-01182）
16KY0212柔性阵列式声表面波微力传感器的研究项目 （）
国家自然科学基金项目( 61274078) （ 61274078）
多尺度声表面波式指条面积加权的小波变换处理器及小波反变换处理器的研究项目 （）
中国纺织工业联合会的"纺织之光"应用基础研究项目( J201608) （ J201608）
用声表面波器件实现纱线张力传感器的研究项目 （）
