传感技术学报2017，Vol.30Issue(9)：1310-1317,8.DOI:10.3969/j.issn.1004-1699.2017.09.002
基于磁致伸缩效应的声表面波电流传感器敏感机理分析
The Sensitive Mechanism of SAW Current Sensor Based on the Magnetomechanics Effect
贾雅娜 1王文2
作者信息
- 1. 中国科学院大学,北京100049
- 2. 声学微机电实验室,中国科学院声学研究所,北京100190
- 折叠
摘要
Abstract
In order to achieve a kind of high-performance current sensor with high sensitivity and low temperature drift,this paper put forward a kind of new current detection method combined the surface acoustic wave(SAW)tech-nology with magnetostrictive effect, analyzed its sensitive mechanism and improved its temperature characteristic. This SAW current sensor used 128°YX-LiNbO3 as piezoelectric substrate,and SiO2 film whose temperature coeffi-cient polarity is opposite to improve the temperature stability,and one of the SAW delay lines was sputtered with gi-ant magneto strictive TbDyFe film to detect current. The applied current induces the TbDyFe film's magneto strictive strain andΔE effect,changes the SAW propagation characteristics. Based on the theory of acousticwave propagation in layered medium,this paper analyzed the SAW propagation characteristics in the TbDyFe film/SiO2/piezoelectric substrate layered structure under given current conditions,especially analyzed the effects of TbDyFe and SiO2 film thicknesson sensor response. The results show that the highest sensitivity can reaches 58.2 kHz/A when the TbDyFe and SiO2 thin film thickness are respectively 0.5μm and 2μm,which shows excellent temperature stability and high sensitivity.关键词
声表面波/电流传感器/磁致伸缩效应/TbDyFe薄膜Key words
SAW/current sensor/magneto mechanics effect/TbDyFe film分类
信息技术与安全科学引用本文复制引用
贾雅娜,王文..基于磁致伸缩效应的声表面波电流传感器敏感机理分析[J].传感技术学报,2017,30(9):1310-1317,8.
