传感技术学报2017，Vol.30Issue(9)：1318-1323,6.DOI:10.3969/j.issn.1004-1699.2017.09.003
一种仿生原理的矢量水听器结构设计与数值研究
A Structure and Analysis for a MEMS Sensor Based on Bionicsprinciple
摘要
Abstract
Inspired by the unique structure of the ormisochraces auditory system,a kind of microelectromechanical ( MEMS) sensor oriented for underwater location detection is proposed. This idea is to adopt MEMS surface passiva-tion process to achieve a hydrophone based on micro differential capacitance detection forthe direction orientation of sound source in the low frequency range. The modal shapes of the hydrophone and the coupling amplification effect has been analyzedby using COMSOL Multiphysics. The numericalresults show that at the first resonance frequency of 333 Hz and in the range of 0°~180°,the differential capacitance unit can amplify acoustic signal amplitude and phase difference significantly,indicating of huge potential of direction orientationfor underwater applications.关键词
微机电/奥米亚棕蝇/测向定位Key words
MEMS/fly ormisochraces/underwater sound location引用本文复制引用
王晓琳,杨军,程晓斌..一种仿生原理的矢量水听器结构设计与数值研究[J].传感技术学报,2017,30(9):1318-1323,6.基金项目
国家自然科学基金项目( 11404368) （ 11404368）
