传感技术学报2017，Vol.30Issue(9)：1324-1329,6.DOI:10.3969/j.issn.1004-1699.2017.09.004
开孔变截面微悬臂梁传感器的等效刚度和固有频率
Equivalent Stiffness and Natural Frequencyof a Variable Cross-Section Microcantilever Sensor witha Hole
摘要
Abstract
This paper focuses on the equivalent normal stiffness of a new-type variable cross-section microcantilever biosensor with a hole and its effect on the natural frequency. First,considering the bending-torsion coupling effect induced by the cavity structure in the longitudinal cross-section of the micro-beam,the cantilever deflection subjec-ted to a concentrated load at the free-end is obtained by the quadratic integral method. Based on the Hooke's law of elastic material,an analytic model is established for the equivalent normal stiffness of the micro-beam. Thereafter, the natural frequency of the micro-beam is obtained by the Rayleigh's method. Finally,the analytical model is veri-fied by comparing with the relevant experimental results and finite element results. The study show that the analyti-cal model has a good accuracy for predicting and calibrating the stiffness,as well as the frequency of the variable cross-section micro-beam with a hole,and the equivalent stiffness and the natural frequency are negatively correlated with the span-to-width ratio,whereas,positively correlated with the inner-to-outer-width ratio. The relevant conclu-sions can provide a theoretical basis and reference for the design of new-type micro-/nano-mechanical sensors with variable cross-sections.关键词
微悬臂梁传感器/变截面/等效刚度/固有频率/解析方法Key words
microcantilever sensors/variable cross-section/equivalent stiffness/natural frequency/analytical method分类
信息技术与安全科学引用本文复制引用
陈金龙,吴君正,张能辉..开孔变截面微悬臂梁传感器的等效刚度和固有频率[J].传感技术学报,2017,30(9):1324-1329,6.基金项目
上海市浦江人才计划项目(15PJD016) （15PJD016）
国家自然科学基金项目(11272193) （11272193）
