红外与毫米波学报2017，Vol.36Issue(4)：389-392,4.DOI:10.11972/j.issn.1001-9014.2017.04.002
基于钽酸锂晶体材料镍铬薄膜在14～16μm波段红外增强吸收特性
Enhanced infrared absorption of NiCr Film fabricated on LiTaO3 crystal material for 14 ～ 16 μm application
摘要
Abstract
Nano-scale metallic films have been proven to be effective infrared absorption layers for pyroelectric detectors operated at 14 ～ 16 μm spectral range for space applications.The infrared absorption improvement can be achieved by adjusting the thickness and surface characteristics of the nano-scale Nickel-chromium (NiCr) film deposited on the LT (lithium tantalite) crystal materials.By regulating the thickness of the crystal materials,the absorption wavelength is adjustable as well by changing the depth of the anti-reflection cavity.To enhance the infrared absorption further,chemical corrosion is applied on this film,which generates a rough nano-scale surface structure and greatly increases the absorption surface area.By combining these two methods,absorption at specified infrared wavelength could be distinctly enhanced,and the manufacturing process is fully compatible and easy to realize.Experiment results suggest that the absorption performance which could be controlled agrees well with the simulation and design.关键词
NiCr/热释电探测器/纳米金属薄膜/化学腐蚀/红外吸收Key words
NiCr/pyroelectric detector/nano-scale thin metallic films/chemical corrosion/infrared absorption分类
数理科学引用本文复制引用
刘子骥,梁志清,何璇,马振东,苟军,蒋亚东..基于钽酸锂晶体材料镍铬薄膜在14～16μm波段红外增强吸收特性[J].红外与毫米波学报,2017,36(4):389-392,4.基金项目
Supported by National Science Funds for Creative Research Groups of China (61421002),National Natural Science Foundation of China (61405027),the Postdoctoral Science Foundation of China (2014M562296),and Fundamental Research Funds for the Central Universities (ZYGX2011X012) （61421002）
