国际设备工程与管理(英文版)2017,Vol.22Issue(2):84-90,7.DOI:10.13434/j.cnki.1007-4546.2017.0203
Several Applications of MEMS in Fluid Area
Several Applications of MEMS in Fluid Area
ZHU Meng-nan 1CAO Yun 1ZHU Hui-jun1
作者信息
- 1. School of Energy and Power Engineering, Jiangsu University, Zhenjiang 212013, P.R.China
- 折叠
摘要
关键词
MEMS/fluid/flow sensor/pressure sensor/applicationsKey words
MEMS/fluid/flow sensor/pressure sensor/applications引用本文复制引用
ZHU Meng-nan,CAO Yun,ZHU Hui-jun..Several Applications of MEMS in Fluid Area[J].国际设备工程与管理(英文版),2017,22(2):84-90,7.