强激光与粒子束2017，Vol.29Issue(10)：94-101,8.DOI:10.11884/HPLPB201729.170115
SOI纳米光波导激光熔凝光整加工温度场的数值模拟及分析
Numerical simulation and analysis on temperature field for laser melting finishing on SOI nano optical waveguide
摘要
Abstract
Laser surface melting technology can effectively reduce nano optical waveguide sidewall roughness for scattering loss reduction.To clarify the temperature field evolution law of KrF excimer laser surface melting on waveguide sidewall,a two dimensional finite element numerical model is established,which has taken into account the effects of temperature dependences of material parameters and latent heat.Several investigations have been made about the relationships between the carry behavior forward of melting pool boundary and different processing parameters.Simulation results indicate that melting pool begins developing in the corner between the upper surface of waveguide and the laser-facing sidewall surface.At a given laser incidence angle,the depth of melting pool is correlated positively with the average energy density.Melting pool shape is mainly controlled by laser incident angle:with the decreasing incidence angle,the melting pool appears firstly single-edge U-shaped,then single-edge V-shaped,and finally single-edge V-shaped with an obtuse angle.Analysis shows that melting pool shape induced by a larger laser incidence angle is more favourable to the finishing process of waveguide sidewall.On this basis,a new process method is proposed for determinating laser incident angle to optimize the shapes of melting pool and then selecting the appropriate laser energy density to obtain sufficient melting depth.关键词
激光加热/表面微加工/有限元方法/光波导/表面粗糙度Key words
laser heating/surface micromachining/finite element method/optical waveguides/surface roughness分类
数理科学引用本文复制引用
闫树斌,陈慧斌,韵力宇,焦国太..SOI纳米光波导激光熔凝光整加工温度场的数值模拟及分析[J].强激光与粒子束,2017,29(10):94-101,8.基金项目
国家自然科学基金项目(61675185,61275166) （61675185,61275166）
山西省自然科学基金项目(2016D01011008) （2016D01011008）
山西省高等院校中青年拔尖创新人才 （）
山西省高校“131”领军人才 （）
山西省留学归国择优基金项目 （）
中北大学杰出青年基金项目 （）
山西省研究生教育创新基金项目(2016SY048) （2016SY048）
