真空电子技术Issue(5)：20-23,4.
半导体器件用陶瓷基片材料发展现状
Development of Ceramic Substrate Materials for Semiconductor Devices
摘要
Abstract
Ceramic materials are important substrate materials for semiconductor devices because of their excellent mechanical strength,high melting point,high hardness,high wear resistance and oxidation resistance.This paper introduces the performance and application of some commonly used ceramics such as beryllium oxide,alumina and aluminum nitride.The paper also describes the physical and mechanical properties of silicon nitride ceramic as a new kind of ceramic substrate material.The advantages of silicon nitride ceramic substrate on semiconductor devices are analyzed and its application prospects are also looked forward.关键词
半导体/陶瓷绝缘基板/氮化硅陶瓷/热导率Key words
Semiconductor/Ceramic substrate/Silicon nitride ceramic/Thermal conductivity分类
信息技术与安全科学引用本文复制引用
张伟儒,郑彧,李正,高崇,童亚琦..半导体器件用陶瓷基片材料发展现状[J].真空电子技术,2017,(5):20-23,4.基金项目
北京市科技计划课题(Z171100002017015) （Z171100002017015）
