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95氧化铝瓷与蓝宝石金属化层对比分析

李芬 田宏 朱虹 薛辽豫 肖东梅 陈亚丽 刘燕文

真空电子技术Issue(5):46-50,5.
真空电子技术Issue(5):46-50,5.

95氧化铝瓷与蓝宝石金属化层对比分析

Comparative Analysis of Metallization between 95 % Alumina Ceramics and Sapphires

李芬 1田宏 1朱虹 1薛辽豫 1肖东梅 1陈亚丽 1刘燕文1

作者信息

  • 1. 中国科学院电子学研究所空间行波管研究发展中心,北京100190
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摘要

Abstract

Scanning electron microscopy and energy dispersive spectroscopy were used to study the morphology and composition of the metallization of 95 % alumina ceramics and sapphire (single crystal alumina ceramics) sintered at different temperatures,and the phenomenon of metallization was analyzed experimentally.The experimental results show that under low sintering temperature (1300℃),the composition of metallization of 95% alumina ceramics and sapphire and the original metal powder have little difference,there is no mutual dissolution between the metallization and the matrix,and the manganese elements combine with alumina in the metallized layer form manganese aluminum spinel;while under high sintering temperature (1470℃),the glassy phases in the metallization layer has a mutual diffusion and migration phenomenon with the 95% alumina ceramic glassy phases.Sapphire does not contain glassy phases,and the density of sapphire is higher than that of 95% alumina ceramics,and so the glassy phases in the sapphire metallization layer is difficult to diffuse into the sapphire with single crystal structure.On the basis of experimental research,the technical measures for improving the quality of sapphire metallization are put forward.

关键词

微波真空电子器件/氧化铝/金属化/玻璃相

Key words

Microwave vacuum electron device/Alumina/Metallization/Glassy Phases

分类

化学化工

引用本文复制引用

李芬,田宏,朱虹,薛辽豫,肖东梅,陈亚丽,刘燕文..95氧化铝瓷与蓝宝石金属化层对比分析[J].真空电子技术,2017,(5):46-50,5.

真空电子技术

1002-8935

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