真空电子技术Issue(5)：59-63,5.
扩散阴极用纯钨棒制备工艺的研究
Study on Preparation of Pure Tungsten Rod for Diffusion Cathode
何学良 1周增林 1陈昀 2王玉春 2李艳 1惠志林 1王伏1
作者信息
- 1. 北京有色金属研究总院,北京100088
- 2. 南京三乐电子信息产业集团有限公司,江苏南京210009
- 折叠
摘要
Abstract
The medium-sized tungsten powder was used as raw material.Firstly the particle size of tungsten powder was modulated by fluidic classification,and then porous tungsten sintered rod was obtained via cold isostatic pressing and hydrogen sintering in high temperature;followed by copper infiltration,machining and copper removal,finally the porous tungsten matrix was achieved.The results showed that:compared with raw tungsten powder without classifying,the particle size distribution of classified tungsten powder was narrower,and the tap density increased obviously,which indicated that the classified tungsten powder has better particle stacking performance.With the increase of sintering temperature,the porosity of rod billets made by classified tungsten powder decreased linearly from 22.8％ at 1900℃ to 17.8％ at 2050℃.When the sintering temperature was 2000℃,the tensile strength of copper infiltrated tungsten could be 864 MPa,and after copper removal,the open porosity measured by MIP (mercury intrusion porosimeter) could be 19.85％ and its average pore diameter was 1.39 μm.The experiment indicated that the tungsten rod could be applied to highly reliable diffusion barium tungsten cathode manufacturing.关键词
扩散阴极/多孔钨基体/渗铜Key words
Dispenser cathode/Porous tungsten matrix/Copper infiltration分类
信息技术与安全科学引用本文复制引用
何学良,周增林,陈昀,王玉春,李艳,惠志林,王伏..扩散阴极用纯钨棒制备工艺的研究[J].真空电子技术,2017,(5):59-63,5.
