西安理工大学学报2017，Vol.33Issue(2)：193-198,6.DOI:10.19322/j.cnki.issn.1006-4710.2017.02.012
数字全息显微术中Zernike表面拟合的相位畸变自动补偿
Automatic compensation of phase distortion based on Zernike surface fitting in digital holographic microscopy
摘要
Abstract
Digital holographic microscopy (DHM) has been widely applied for the topography measurement of microscopic specimen.However,the off-axis arrangement and microscope objective introduce the first-order and second-order phase distortion in DHM respectively,and thus the phase tilt and curvature appear in the reconstructed image,leading to a failure in retrieving the correct three-dimensional information of specimen.A total surface fitting method based on Zernike polynomials is presented to compensate the phase distortion,in which the thin specimen with high-spatial-frequency content is considered to be a small modulation superimposed on the whole phase distortion.The total phase surface fitting based on Zernike polynomials is performed to eliminate the tilt,defocus,astigmatism,coma and spherical aberration.The phase distortion can be automatically compensated in the reconstructed image.The approach can compensate the several primary aberrations by only one hologram.It has the advantage of simple and fast execution.The phase grating experiment demonstrates the feasibility of the approach and retrieves correctly the three-dimensional topography of grating.关键词
数字全息显微/相位畸变补偿/表面拟合法/Zernike多项式拟合Key words
digital holographic microscopy (DHM)/phase distortion compensation/surface fitting method/Zernike polynomials fitting分类
通用工业技术引用本文复制引用
刘芸,焦明星,邢俊红,刘健宁..数字全息显微术中Zernike表面拟合的相位畸变自动补偿[J].西安理工大学学报,2017,33(2):193-198,6.基金项目
国家自然科学基金资助项目(61605156) （61605156）
陕西省科技厅自然科学基础研究计划资助项目(2016JQ6073) （2016JQ6073）
