材料科学与工程学报2017，Vol.35Issue(4)：596-599,606,5.DOI:10.14136/j.cnki.issn 1673-2812.2017.04.016
Cu/Al2O3复合薄膜的制备及其抗氧化性能
Preparation and Oxidation Resistance of Cu/Al2O3 Thin Film
摘要
Abstract
Cu/Al2O3 thin film deposited on the surface of fiber substrate by the secondary sputtering deposition method.Surface morphology、element content and shielding effectiveness of Cu/Al2O3 thin film that deposited with 3600 hours under the room temperature were tested by scanning electron microscope (SEM)、energy dispersion X ray spectrometer(EDX) and vector network analyzer.Cu/Al2O3 thin film was compared with copper film on the same processing conditions.Results show that the structure of copper is unstable.However,the structure of Al2O3 film which is on the surface of composite film is stable and compact.Cu/ Al2O3thin film ensure higher shielding property,and its whole structure is still stable.It also has great oxidation resistance.关键词
磁控溅射/Cu/Al2O3复合薄膜/屏蔽效能/抗氧化性能Key words
magnetron sputtering/Cu/Al2O3 thin film/shielding effectiveness/oxidation resistance分类
轻工纺织引用本文复制引用
盛澄成,徐阳,魏取福,乔辉..Cu/Al2O3复合薄膜的制备及其抗氧化性能[J].材料科学与工程学报,2017,35(4):596-599,606,5.基金项目
江苏省自然科学基金资助项目(BK20150155) （BK20150155）
江苏省产学研联合创新资金资助项目(BY2014023-23) （BY2014023-23）
