硅酸盐通报2017，Vol.36Issue(9)：2951-2957,7.
热处理对Sb:SnO2透明导电薄膜光电性能的影响
Effect of Heat Treatment on the Optical and Electrical Properties of Sb:SnO2 Transparent Conduction Films
摘要
Abstract
The high quality Sb:SnO2 transparent conduction films were deposited on quartz glass by radio frequency magnetron sputtering using the 5Sb2O5· 95SnO2(mol%) ceramic target.The effects of heat treatment temperature on the structure , optical and electrical properties of ATO films were studied .The results show that all the phase structure , crystallinity and properties of ATO films are affected by heat treatment .The grain size of films increases with the increase of the heat treatment temperature , while the sheet resistance decreases until to its'minimum of 9 .3 Ω/□.The infrared reflectivity firstly increases and then decreases with increasing temperature and shows its'maximum ( about 89%) at 600 ℃.The transmittances of films are more than 80%in the visible region and the best sample treated at 600 ℃is up to 91 .3%.关键词
Sb:SnO2/磁控溅射/红外反射/热处理Key words
Sb:SnO2/magnetron sputtering/infrared reflection/heat treatment分类
数理科学引用本文复制引用
梁斐,赵修建,倪佳苗,郑敏栋..热处理对Sb:SnO2透明导电薄膜光电性能的影响[J].硅酸盐通报,2017,36(9):2951-2957,7.基金项目
湖北省技术创新重大项目(2013AAA005) （2013AAA005）
湖北省自然科学基金面上项目(2014CFB563) （2014CFB563）
