机械制造与自动化Issue(5)：15-19,5.DOI:10.19344/j.cnki.issn1671-5276.2017.05.004
工艺参数对多弧离子镀TiAlN涂层铝含量和硬度的影响
Effects of Deposition Parameters on Aluminum Content and Hardness of TiAlN Coatings by Multi-arc Ion Plating Technique
摘要
Abstract
The effects of deposition parameters on aluminum content and hardness of TiAlN hard coatings by multi-arc ion plating technique are researched on. By the experiment, this paper analyzes the influence of four different factors:arc current, negative bi-as, nitrogen/argon flow ratio and cavity pressure, on Al content and hardness. The results indicate that the factors having influence on the aluminum content are cavity pressure, nitrogen/argon flow ratio, negative bias and arc current in turn, and the factors having influence on the coating hardness are arc current, nitrogen/argon flow ratio, cavity pressure and negative bias in turn.关键词
多弧离子镀/TiAlN涂层/正交分析/Al含量/硬度Key words
multi-arc ion plating technique/TiAlN coatings/orthogonal analysis/aluminum content/surface hardness分类
矿业与冶金引用本文复制引用
周陶,袁军堂,汪振华,黄雷..工艺参数对多弧离子镀TiAlN涂层铝含量和硬度的影响[J].机械制造与自动化,2017,(5):15-19,5.基金项目
国家自然科学基金(51275247) （51275247）
江苏高校优势学科建设工程资助项目 （）
