传感技术学报2017，Vol.30Issue(10)：1478-1482,5.DOI:10.3969/j.issn.1004-1699.2017.10.004
基于LCP衬底的柔性湿度传感器研究
Research on a Flexible Humidity Sensor Based on LCP Substrate
摘要
Abstract
Anovel flexible capacitive humidity sensor is presented . We took advantage of liquid crystal poly-mer(LCP)as the substrate,copper(Cu)interdigitated(IDT)structureas electrodes and polyimide as the sensing film.The senor is flexible with the aid of the LCP substrate. Compared with conventional humidity sensors based on silicon(Si)substrate the flexible humidity sensor has advantages of low cost,simple structure and easy fabrication process. Theaverage sensitivity and the maximum hysteresisof the humidity sensor are 0.04%pF/%RH and ±4.16%RH,respectivelyat 25 ℃. The average sensitivity of the humidity sensor is hardly affected by the temperature in the range of 25℃~70℃. In addition,the response time and recovery time of the flexible humidity sensor are 36 s and 39 s,respectively. This flexible humidity sensor can be applied in environmental humidity monitoring,artificial skin and wearable devices etc.关键词
柔性/湿度传感器/LCP/电容式传感器Key words
flexible/humidity sensor/LCP/capacitive sensor分类
信息技术与安全科学引用本文复制引用
章丹,黄见秋,王立峰..基于LCP衬底的柔性湿度传感器研究[J].传感技术学报,2017,30(10):1478-1482,5.基金项目
国家863项目(2015AA042602) （2015AA042602）
