传感技术学报2017，Vol.30Issue(10)：1483-1487,5.DOI:10.3969/j.issn.1004-1699.2017.10.005
微机械开放式射流陀螺的敏感原理和数值仿真
Research on Sensitive Mechanism and Numerical Simulation of Open Fluidic Gyroscope Based on MEMS
摘要
Abstract
The design,sensitive mechanism and numerical simulation of an fluidic gyroscope based on MEMS with an open airflow channel are reported. The 3D transient numerical analysis based on the fluid-structure interaction was used to calculate the movement of airflow in the sensitive element. Calculations and results indicated that:①With the drive of piezoelectric pump,the airflow flows into the open airflow channel through two inlets and then gather together. Then,the airflow flows through the nozzle and forms the sensitive jet flow in the fluidic sensing cavi-ty,thus there is a directional flow between inlets and outlet. ②Sensitive jet flow deflects because of the Coriolis Force and exchanges heat with the hotwires which forms the Wheatstone bridge. Therefore,Wheatstone bridge out-puts an unbalanced voltage proportional to the applied angular velocity. ③The sensitivity of mentioned gyroscope is SFZ=2.0 μV/°/s,and simultaneously,the nonlinearity is better than 0.5%.关键词
射流陀螺/开放式气流通道/MEMS/角速度/热线Key words
fluidic gyroscope/open airflow channel/mems/angular velocity/hotwire分类
信息技术与安全科学引用本文复制引用
朴林华,朴然,常兴远,胡永辉..微机械开放式射流陀螺的敏感原理和数值仿真[J].传感技术学报,2017,30(10):1483-1487,5.基金项目
国家自然科学基金项目(60772012) （60772012）
北京市自然科学基金重点项目和北京市教委科技计划重点项目(KZ201511232034) （KZ201511232034）
北京市重点实验室开放课题项目 （）
北京市新世纪百千万人才工程培养项目 （）
现代测控技术教育部重点实验室项目 （）
