光学精密工程2017，Vol.25Issue(9)：2267-2276,10.DOI:10.3788/OPE.20172509.2267
测试设备位姿失调对自准直仪法测量圆分度误差的影响
Influence of test equipment pose error on dividing error measurement based on autocollimator
摘要
Abstract
In order to improve the measurement accuracy of dividing error of encoders ,the principle and method to measure dividing error by using angular polygon and autocollimator were introduced , and the error sources were analyzed .According to the measurement principle ,coordinate systems of angular polygon and autocollimator were established . Utilizing the method of coordinate transformation ,precise mathematical models were deduced for indicating the relationships between dividing error and misalignment errors , such as parallelism error between the angular polygon working surface and the axis of the tested unit ,perpendicularity error between autocollimator optical axis and the working surface of angular polygon , parallelism error between vertical wire of the autocollimator and the axis of the tested unit .In order to verify the error models of misadjustment , three experiments were performed in the laboratory , taking the positioning error of a single-axis position turntable as test object .The experimental and theoretical results have good consistency and the maximum deviation was less than 0 .9″,which indicate that the error models of misadjustment are applicable to guide dividing error measurement .关键词
角度测量/误差分析/坐标变换/分度误差/多面棱体/自准直仪Key words
angular surveying/error analysis/coodinate transformation/dividing error/angular polygon/autocollimator分类
信息技术与安全科学引用本文复制引用
田留德,赵建科,王涛,赵怀学,段亚轩,刘朝晖..测试设备位姿失调对自准直仪法测量圆分度误差的影响[J].光学精密工程,2017,25(9):2267-2276,10.基金项目
国家863高技术研究发展计划资助项目(No.2012AA708703A) （No.2012AA708703A）
中国科学院创新基金资助项目(No.Y154451ZZ0) （No.Y154451ZZ0）
