光学精密工程2017，Vol.25Issue(9)：2309-2316,8.DOI:10.3788/OPE.20172509.2309
单频激光干涉仪正交信号的高精度处理
High precision processing of quadrature signals for homodyne interferometer
摘要
Abstract
In order to improve the reliability and repeatability of phase counting and subdivision of quadrature signals for homodyne interferometers ,a high accuracy error compensation algorithm for quadrature signals combined error correction with phase-based counting and subdivision was proposed based on the Heydemann correction model of quadrature signals and digital signal processing technology . Matrix manipulation based on the least square method was adopted to calculate compensation parameter initials of quadrature signals ,which were corrected by iterative operation to further improve the compensation accuracy .Then phase-based counting and subdivision algorithm was established base on the revised signals .Finally ,the algorithm was verified with Matlab software . Experimental results show that the proposed algorithm can accurately compensate the error of the quadrature signals ,and the measurement accuracy achieves sub-nanometer or even picometer scales , thus the demodulation accuracy of the measured signals can be improved effectively .关键词
单频激光干涉仪/正交信号/误差补偿/细分辨向/测量精度Key words
homodyne interferometer/quadrature signals/error compensation/counting and subdivision/measurement accuracy分类
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夏豪杰,胡梦雯,张欣..单频激光干涉仪正交信号的高精度处理[J].光学精密工程,2017,25(9):2309-2316,8.基金项目
国家自然科学基金资助项目(No.51375138) （No.51375138）
国家自然科学基金重大科研仪器研制项目(No.51427805) （No.51427805）
