有色金属科学与工程2017，Vol.8Issue(5)：109-114,6.DOI:10.13264/j.cnki.ysjskx.2017.05.016
Al靶溅射功率对CrAlN涂层组织结构及摩擦性能的影响
Effect of Al target sputtering power on themicrostructure and tribological properties of CrAlN coatings
摘要
Abstract
In order to explore the direct effects of Al target power on theproperties of CrAlN coatings, the coatings were deposited on 304 stainless steel substrate by DC reactive magnetron sputtering method. The experiment studied the effects of different AI target power on the microstructure and friction properties of the coatings. The phase composition, surface morphology, friction and wear property, wear track morphology and hardness of the samples were characterized by SEM, XRD, AFM, reciprocating friction and wear testing machine, microhardness tester an d 3 D surface profiler. The results show that the grain size of the coatings has a slight tendency of increasing and then decreasing with the increase of Al target power. It is at minimum when the target power is 180w. With the increase of Al target power, the microhardness and average deposition rate have a tendency of increasing first and then decreasing. However, wear depth and average volume wear rateare just the opposite. After comparison, the comprehensive performance of CrAlN coatings is the best when the Al target power is 150 W.关键词
磁控溅射/CrAlN/摩擦磨损/表面形貌Key words
magnetron sputtering/CrAlN coatings/friction and wear/surface morphology分类
矿业与冶金引用本文复制引用
张钦英,陈颢,任兴润,文彦..Al靶溅射功率对CrAlN涂层组织结构及摩擦性能的影响[J].有色金属科学与工程,2017,8(5):109-114,6.基金项目
国家自然科学基金资助项目(51464013) （51464013）
江西省科技厅重点研发计划项目(20151BBE50002) （20151BBE50002）
江西理工大学青年英才支持计划资助项目 （）
