东南大学学报（自然科学版）2017，Vol.47Issue(5)：913-917,5.DOI:10.3969/j.issn.1001-0505.2017.05.012
面向生物分子检测的MoS2膜流体场效应管的制备
Fabrication of molybdenum disulfide field-effect transistor for detection of biological molecules
摘要
Abstract
To improve the sensitivity of biological molecules detection,the molybdenum disulfide (MoS2) field-effect transistors (FETs) were fabricated by the following steps:preparation of SiNx substrate,preparation of MoS2 membrane and deposition of gold electrodes.Fabricated FETs were performed with electrical characterization and tested under both air and wet conditions.The results show that the leakage current is in a linear relationship with the voltage,when the back-gate voltage is zero,indicating that the contact between the electrode and the MoS2 sample is the ohmic contact.The MoS2 membrane is monolayer using mechanically exfoliated methods.The resistance of the transistor under the wet condition is smaller than that in air for the increasing impurity doping concentration of samples under the wet condition.Besides,with the increasing of the liquid-gate voltage,the slope of the Ids-Vds can improve a lot.As a novel two-dimensional material,the MoS2 membrane can be used in the field-effect transistors fabrication to improve the sensitivity of the biological molecules detection.关键词
二硫化钼/场效应晶体管/背栅电压/转移过程/生物分子检测Key words
molybdenum disulfide (MoS2)/field-effect transistor/back-gate voltage/transfer process/biological molecules detection分类
通用工业技术引用本文复制引用
沙菁(契),徐伟,徐冰,邹益人,陈云飞..面向生物分子检测的MoS2膜流体场效应管的制备[J].东南大学学报（自然科学版）,2017,47(5):913-917,5.基金项目
国家自然科学基金资助项目(51375092,51675101)、中央高校基本科研业务费专项资金资助项目(2242015R30002). （51375092,51675101）
