中南大学学报（自然科学版）2017，Vol.48Issue(10)：2628-2634,7.DOI:10.11817/j.issn.1672-7207.2017.10.010
精密运动平台的五自由度误差同时测量方法
Simultaneous measurement of five-degree-of-freedom motion errors of high-precision motion platforms
摘要
Abstract
A quite simple and novel method for simultaneous measurement of five-degree-of-freedom motion errors was proposed. The collimated laser beam was used as the reference line, and only a cube corner prism was adopted in the moving platform as the sensitive element. The optical system was composed of a rhombic prism, a focus lens and three detectors. The results show that the horizontal and vertical straightness errors as well as pitch, yaw and roll angle errors can be measured simultaneously. At the same time, the measuring head is smart and wireless. The resolution of the straightness and angle errors can reach 0.1 μm, 1″, respectively, and the measurement accuracy of straightness errors and angular errors are about 1 μm and 5″within the travel range of ahigh-precision motion platform. This system is compact and can be easily equipped to any motion platforms to implement the measurement of multi-degree-of-freedom motion errors.关键词
同时测量/五自由度/运动误差/准直光束/运动平台Key words
simultaneous measurement/five-degree-of-freedom/motion errors/collimated beam/high-precision motion platform分类
信息技术与安全科学引用本文复制引用
王丽军,郑煜,吕文,李继攀,段吉安..精密运动平台的五自由度误差同时测量方法[J].中南大学学报（自然科学版）,2017,48(10):2628-2634,7.基金项目
国家自然科学基金资助项目(51475479) （51475479）
国家高新技术研究发展计划(863计划)项目(2012AA040406) （863计划）
湖南省自然科学基金资助项目(14JJ2010) （14JJ2010）
浙江大学流体动力与机电系统国家重点实验室开放基金资助项目(ZKF-201401) (Project (51475479) supported by the National Natural Science Foundation of China （ZKF-201401）
Project (2012AA040406) supported by the National High-Tech R&D Program of China （2012AA040406）
Project (14JJ2010) supported by the Natural Science Foundation of Hunan Province, China （14JJ2010）
Project (ZKF-201401) supported by the Open Project of Stage Key Laboratory of Fluid Power Transmission and Control, Zhejiang University) （ZKF-201401）
