表面技术2017，Vol.46Issue(11)：55-61,7.DOI:10.16490/j.cnki.issn.1001-3660.2017.11.008
TiSi(CN)系列涂层的结构和性能研究进展
Research Progress of Structure and Property of TiSi(CN) Coatings
摘要
Abstract
In recent years, with the development of industries, the application of machine parts is faced with new challenges. The coating failure of the key parts resulting from the abrasion and corrosion is particularly significant. Titanium-based coatings are getting more attention because of its low friction coefficient, high hardness, good wear resistance and excellent corrosion re-sistance. The research status of structure and property of the TiSiC, TiCN, TiSiN and TiSiCN hard coatings prepared by physical vapor deposition are summarized. The development of Ti-based coating is briefly summarized, and the structural characteristics, hardness, adhesive strength, anti-friction performance, wear resistance and corrosion resistance of the four kinds of hard coat-ings are emphatically analyzed and compared. The influence factors of coatings produced by different methods are analyzed and the different failure modes of the coating are explained. The coating is described from the perspective of microstructure and performance. The constitutive relationship between the change in the bond structure and phase structure of the carbon in the hard coating and the anti-friction, self-lubricating performance of the hard coating is illustrated. Based on that, the important role of carbon graphitization plays in the anti-friction performance of the coating is pointed out. The mechanism of structure-induced super hard phenomenon of titanium-based hard coatings is discussed. The characteristics of the super-hard wear-resistant and anti-friction coatings are concluded and evaluated. Finally, the problems currently existing in Ti-based coating research at home and abroad are summarized and the development direction and prospects of the titanium-based multi-element and multi-interface hard coatings by physical vapor deposition are envisaged.关键词
物理气相沉积/硬质涂层/结构/硬度/摩擦学行为Key words
PVD/hard coatings/structure/hardness/tribological behavior分类
矿业与冶金引用本文复制引用
谢新明,李金龙,王永欣,张恒华,王立平..TiSi(CN)系列涂层的结构和性能研究进展[J].表面技术,2017,46(11):55-61,7.基金项目
浙江省自然科学基金(LY14E010005) （LY14E010005）
质监总局公益项目(2011IB81001) Supported by the Zhejiang Provincial Natural Science Foundation of China (LY14E010005) and the Public Welfare Project of the State Administration of Quality Supervision (2011IB81001) （2011IB81001）
