传感技术学报2017，Vol.30Issue(12)：1800-1807,8.DOI:10.3969/j.issn.1004-1699.2017.12.004
氧等离子体处理ZnO纳米纤维材料的制备及其对丙酮气敏性能的研究
The Preparation and Acetone Gas Sensing Properties of ZnO Nanofiberstreated by Oxygen Plasma
摘要
Abstract
ZnO nanofibers were synthesized by an electrospinning method and subsequently treated by oxygen plas-ma. The structure and morphology of the samples were characterized using X-ray diffraction( XRD) ,scanning elec-tron microscopy(SEM),Brunner-Emmet-Teller(BET)measurements and X-ray photoelectron spectroscopy(XPS). The sensitivity of the plasma treated and untreated ZnO nanofibers towards acetone from 1 × 10-6 to 100 × 10-6 ( volume fraction) was investigated. It was found that the gas sensing properties of ZnO nanofibers to acetone vapor obviously improved after it treated by oxygen plasma,such as decreasing the operating temperature and enhancing the response value. Meanwhile,the responses of the treated ZnO nanofibers sensor to formaldehyde,benzene,xylene and methylbenzene decrease,indicating an improved selectivityand anti-disturbance from interference to acetone va-por. The improvement mechanism of ZnO nanofibers treated by oxygen plasma is analyzed briefly by means of deple-tion layer thickness and potential barriers between grains.关键词
气体传感器/氧等离子体/ZnO纳米纤维/改性机理/丙酮Key words
gas sensor/oxygen plasma/ZnO nanofibers/modification mechanism/acetone分类
信息技术与安全科学引用本文复制引用
王惠生,杜海英,王小风,王兢..氧等离子体处理ZnO纳米纤维材料的制备及其对丙酮气敏性能的研究[J].传感技术学报,2017,30(12):1800-1807,8.基金项目
国家自然科学基金项目(61574025,61501081,51602035) （61574025,61501081,51602035）
