传感技术学报2017，Vol.30Issue(12)：1845-1849,5.DOI:10.3969/j.issn.1004-1699.2017.12.011
基于数据处理的高精度温压复合传感器的研究与设计
Research and Design of High Precision Temperature and Pressure Sensor Based on Data Processing
谢锋 1程文进 1曹勇全1
作者信息
- 1. 中国电子科技集团公司第四十八研究所,长沙410111
- 折叠
摘要
Abstract
Single traditional diffusion silicon pressuresensitive probe is chosen to meet the high-precision measurement requirements of Pressure and temperature in the field of aerospace,where the weight must as light as possible. The original calibration datas of multi-temperature multi-pressure point are obtained by measuring the output voltage of the sensitive probe under constant current excitation. The input and output variable functions are fitted by the main influ-encing factor. And then the linear or curve family interpolation error correction method is used to reduce the fitting er-ror. The comprehensive accuracy of the pressure is increased from 1.13% FS to 0.05% FS,and from 2.06% FS to 0.05% FS for temperature. The sensor finally meet the user 0.05% FS comprehensive accuracy requirements.关键词
温压一体传感器/数据处理/误差修正/曲线簇插值Key words
temperature and pressure integrated sensor/data processing/error correction/curve cluster interpolation分类
信息技术与安全科学引用本文复制引用
谢锋,程文进,曹勇全..基于数据处理的高精度温压复合传感器的研究与设计[J].传感技术学报,2017,30(12):1845-1849,5.
