传感技术学报2017，Vol.30Issue(11)：1636-1642,7.DOI:10.3969/j.issn.1004-1699.2017.11.004
基于PTFE基材的FAIMS传感器设计
Design of a PTFE-Based FAIMS Sensor
摘要
Abstract
In order to reduce the complexity and cost of FAIMS sensor,an FAIMS sensor based on PTFE is de-signed. The sensor consists of drift tube,ionization source and peripheral circuit. The drift tube is built on the PTFE substrate,where the Au electrodes were produced byPCB process;and the total volume of the drift tube is 1.9 cm3. A corona discharge ionization source is on the top of the FAIMS substrate. The peripheral circuit includes the high frequency and high-voltage asymmetric waveform,the compensating electric waveform generating circuit and the weak ion current amplifying circuit. It is less than 3 seconds of the response recovery time. A chemical agent simu-lant(Dimethyl methylphosphonate,DMMP)was tested,and the detection of DMMP is the 0.5 μg/m3.关键词
高场非对称波形离子迁移率谱/电晕放电/离子源/甲基膦酸二甲酯Key words
FAIMS/corona discharge/ionization source/DMMP分类
信息技术与安全科学引用本文复制引用
赵东杰,刘军,丁庆行..基于PTFE基材的FAIMS传感器设计[J].传感技术学报,2017,30(11):1636-1642,7.基金项目
北京高校物流技术工程研究中心项目(BJLE2010) （BJLE2010）
