光学精密工程2017，Vol.25Issue(10)：2551-2563,13.DOI:10.3788/OPE.20172510.2551
1.23 m SiC主镜的本征模式主动光学校正
Active correction of 1 .23 m SiC mirror using bending mode
摘要
Abstract
As active correction of a large aperture SiC mirror with high stiffness is vulnerable to many calculation errors by direction least square method or free resonance method ,this paper proposes a primary surface correction algorithm using bending mode to calculate and optimize the active force and to improve the correction capability .Firstly ,a series of mathematical transformations were performed on the influence matrix of the primary mirror ,and a set of orthogonal bending modes of primary mir-ror were obtained .Then ,correction targets were fitted in bending modes to calculate the correction force .An 1 .23 m SiC mirror and a support system were modeled by finite element analysis and the al-gorithm was verified by simulation experiments .Moreover ,an active support system for the 1 .23 m SiC mirror was set up to correct primary surface and a further optimization for the algorithm was con-ducted based on this system .The experiments show that the surface error is corrected from 0 .23λRMS to 0 .048λRMS by the proposed bending mode .Results of analysis and experiment demonstrate that the algorithm by bending mode efficiently reduces active force ranges and improves correction ca-pability .It is significant for the active correction of large aperture SiC mirrors with high stiffness .关键词
主动光学/SiC主镜/面形校正/本征模式/S-H传感器Key words
active optics/SiC mirror/aberration correction/bending mode/S-H sensor分类
机械制造引用本文复制引用
朱熠,陈涛,王建立,李宏壮,吴小霞..1.23 m SiC主镜的本征模式主动光学校正[J].光学精密工程,2017,25(10):2551-2563,13.基金项目
国家自然科学基金资助项目(No.61605199) （No.61605199）
