光学精密工程2017，Vol.25Issue(10)：2682-2688,7.DOI:10.3788/OPE.20172510.2682
子孔径拼接干涉的快速调整及测量
Rapid adjustment and measurement for subaperture stitching interferometry
摘要
Abstract
An automatic and quick adjustment method for zero interference fringes was proposed to meet the requirement of high precision subaperture stitching interferometry .The influence of inter-ference fringe numbers on stitching errors was analyzed ,and the analyzed results show that the inter-ferometer return error is less than λ/50(PV value) when the interference fringe numbers of subaper-ture are less than 5 .A subaperture stitching measurement apparatus was optimized ,and an auto-com-pensation method of angular displacement deviation for the motion stage was proposed .By which ,ze-ro fringe of each subaperture was realized ,and the cumulative error of subaperture stitching was con-trolled finally .A 450mm × 60mm flat mirror was measured by subaperture stitching interferometry , the experiment result show s that the surface distributions of automatic stitching measurement results are more consistent with that of the zero fringe measurement by manual adjustment ,the measuring speed and measuring efficiency are improved and the measuring time is reduced by 5 min on average . As compared with zero fringe measurement by manual adjustment .The proposed method not only completes the automatic positioning and automatic adjustment of the interference stitching measure-ment apparatus ,but also improves the measuring repeatability and detection efficiency .关键词
干涉测量/自动测量/子孔径拼接/拼接误差Key words
interferometry/automatic measurement/subaperture stitching/stitching error分类
数理科学引用本文复制引用
郭福东,唐锋,卢云君,王向朝..子孔径拼接干涉的快速调整及测量[J].光学精密工程,2017,25(10):2682-2688,7.基金项目
国家科技重大专项资助项目(No.2011zx02402-003) （No.2011zx02402-003）
