光学精密工程2017，Vol.25Issue(11)：2796-2802,7.DOI:10.3788/OPE.20172511.2796
eXTP望远镜用W/Si多层膜
DW/Si multilayer for eXTP mission
摘要
Abstract
For the requirements of an embedded focused imaging telescope in eXTP (enhanced X-ray Timing and Polarization satellite ) for W/Si multilayers on a cylindrical mirror ,W/Si multilayers were fabricated at a grazing incident angle of 0 .5 ° and working range of 1—30 keV , and multilayer fabrication technologies were optimized . Firstly , separator plates and masks were mounted to collimate the sputtering particles to optimize different background pressures and working gas pressures in the deposition process and to improve the quality of periodic multilayers .T hen ,a novel kind of revolution speed curve was designed for controlling the thickness to make the layer thickness be uniform at the mirror axes .The separator plates were mounted on the mounting plate on both sides of the mirror to make the different axis thicknesses be equal .Finally ,the depth-graded structure was designed by using the power law expression , a sample was prepared and measured in Beijing Synchrotron Radiation Facility (BSRF ) and the measured results are identical with that of design theory .By optimized multilayer fabrication technologies ,a multilayer with a d-spacing of 3 .8 nm , thickness ratio of tungsten of 0 .47 and the total number of bilayers of 80 was fabricated .The results show that the interfacial roughness of the multilayer is only 0 .29 nm and the layer thickness variation on the cylindrical mirror has been controlled less than 3% . T he measurement indicates that depth-graded multilayer can meet the requirements of the embedded focused imaging telescope in eXTP mission for layer quality ,layer thickness uniform and energy spectral response .关键词
eXTP项目/界面粗糙度/薄膜厚度均匀性/柱面镜/非周期多层膜Key words
eXTP mission/interfacial roughness/thickness uniform/cylindrical mirror/depth-graded multilayer分类
数理科学引用本文复制引用
齐润泽,黄秋实,杨洋,张众,王占山..eXTP望远镜用W/Si多层膜[J].光学精密工程,2017,25(11):2796-2802,7.基金项目
国家自然科学基金创新研究群体科学基金资助项目(No.61621001) （No.61621001）
国家自然科学基金资助项目(No.11375130) （No.11375130）
