光学精密工程2017，Vol.25Issue(11)：2810-2816,7.DOI:10.3788/OPE.20172511.2810
软X射线光发射电子显微镜光束线聚焦用KB镜系统
KB mirror system of X-ray photo-emission electron microscope beamline
摘要
Abstract
A high accuracy micro-focusing system was designed to improve the light spot focusing quality of the X-ray beam-line for Photo-emission Electron Microscope ( PEEM ) in Shanghai Synchrotron Radiation Facility (SSRF) .The layout of PEEM beam-line of the SSRF was introduced and basic parameters of optics of the micro-focusing system were presented .Two Kirkpatrick-Baez mirrors (KB mirror) were adopted to finish the design of micro-focusing system .The design scheme of a key component-posture adjusting mechanism in the system was introduced . Namely , a three vertical linear driving equipment and a two horizontal linear driving device were combined to implement five-dimensional adjustment of the system . The working principle and process of the posture adjusting mechanism were introduced ,and the overall design scheme of micro-focusing system were analyzed deeply .The mechanical performance of KB mirror system was tested ,and the testing results of the horizontal adjusting mechanism and the pitch motion of first mirror were given .That the resolution and repeat accuracy of horizontal adjusting mechanism are 0 .6 μm and 0 .85 μm respectively ,and those of pitch motion are 0 .4″and 0 .5″respectively ,w hich are better than that of the technical requirements .The other parameters were tested as well ,and the results also satisfy the technical requirements .The realization of technical targets of KB mirror system guarantees the high quality focusing of PEEM bean-line .关键词
同步辐射/光发射电子显微镜(PEEM)/X射线显微镜/KB镜/结构设计Key words
synchrotron radiation/Photo-emission Electron Microscope (PEEM )/X-ray microscopy/KB mirror/structure design分类
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陈家华,龚学鹏,薛松,卢启鹏,彭忠琦,宋源,王依..软X射线光发射电子显微镜光束线聚焦用KB镜系统[J].光学精密工程,2017,25(11):2810-2816,7.基金项目
国家自然科学基金资助项目(No.61404139) （No.61404139）
应用光学国家重点实验室自主基金资助项目(No.Y5743FQ158) （No.Y5743FQ158）
吉林省重点科技成果转化项目(No.20150307039GX) （No.20150307039GX）
