光学精密工程2017，Vol.25Issue(11)：2817-2822,6.DOI:10.3788/OPE.20172511.2817
聚甲基丙烯酸甲酯材质硬X射线组合Kinoform透镜的制作
Fabrication of PMMA hard X-ray compound Kinoform lenses
摘要
Abstract
To improve the focusing performance of hard X-ray focusing elements , a hard X-ray Compound Kinoform Lens (CKL) based on Polymethyl methacrylate (PMMA) with a depth of 60μm is fabricated by LIGA ( Lithographie ,Galvanoformung ,Abformung)technology ,and its excellent morphology is obtained .The main structure of CKL is a narrow pattern with a few micron widths , including the curve and the rectangular surfaces ,and the width of the narrowest pattern is only 2μm . The fabrication of the CKL is divided into three parts to ensure its excellent morphology :the transitional mask preparation ,LIGA mask preparation ,and hard X-ray exposure to get the finial samples .T he nanopillar arrays on silicon substrate are used to solve the falling-off problem of the photoresist during the LIGA mask preparation .Then the PMMA sample with a high molecular weight is selected as the substrate to improve the rigidity of the PM M A and to relieve the adhesion and collapse of the narrow pattern in the final sample preparation .The focusing performance of CKL is tested at X-ray microscope beam-line of Beijing Synchrotron Radiation Facility (BSRF ) . The experiment result for an 8 keV X-ray at transmission shows its full-width-at-half-maximum (FWHM ) peak size for focusing spot is 440 nm .关键词
Kinoform镜/X射线聚焦透镜/聚甲基丙烯酸甲酯(PMMA)/LIGA技术Key words
Kinoform lens/x-ray focusing lens/LIGA technology/Polymethyl Methacrylate(PMMA)分类
数理科学引用本文复制引用
刘静,伊福廷,盛伟繁,常广才,张伟伟..聚甲基丙烯酸甲酯材质硬X射线组合Kinoform透镜的制作[J].光学精密工程,2017,25(11):2817-2822,6.基金项目
国家自然科学基金青年基金资助项目(No.11605226 （）
No.11305202) （）
