光学精密工程2017，Vol.25Issue(11)：2823-2828,6.DOI:10.3788/OPE.20172511.2823
真空紫外波段Al膜保护层MgF2的光学常数
Optical constant of MgF2 coatings for Al/MgF2 mirror in vacuum ultraviolet region
摘要
Abstract
As the optical constant of MgF2 over-coated Al mirror effects its optical performance greatly ,this paper explores the method to obtain the optical constant .Three Al/MgF2 mirror samples covered by MgF2 coatings with different thicknesses were deposited on B270 substrates at room temperature by thermal evaporation method .T he layer structures of the samples such as the thickness and the roughness were characterized by the grazing incidence X-ray reflectometry .The reflectivities of the samples at a incidence angle of 5° were measured in 105—130 nm region at the National Synchrotron Radiation Laboratory(NSRL) .Finally ,the optical constant of MgF2 for Al/MgF2 mirror was obtained by Fresnel formulas at given wavelength and corresponding reflectivity when the coating thicknesses of MgF2 ,Al ,and the optical constant of Al have been known .The common intersection point of the curves of three MgF2 coatings with different thickness for Al/MgF2 mirror determines the optical constant of MgF2 coating at given wavelength . The analysis and comparison show that calculated reflectivity from optical constants of this work agrees well with measured reflectivity curves in 108—128 nm region .关键词
真空紫外/反射镜/保护层/光学常数/菲涅尔公式/热蒸发Key words
vacuum ultraviolet/mirror/protective layer/optical constant/Fresnel formulas/thermal evaporation分类
数理科学引用本文复制引用
王风丽,张壮壮,王占山,周洪军,霍同林..真空紫外波段Al膜保护层MgF2的光学常数[J].光学精密工程,2017,25(11):2823-2828,6.基金项目
国家自然科学基金面上项目(No.11573020) （No.11573020）
国家重大仪器开发专项(No.2012YQ04016403 （）
No.2012YQ13012505) （）
