中国光学2017，Vol.10Issue(6)：790-797,8.DOI:10.3788/CO.20171006.0790
光学元件狭缝柔性调节机构的设计与分析
Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements
摘要
Abstract
An adjustment mechanism with slit diaphragm flexures is designed to keep the optical elements with higher guide precision while maintaining higher accuracy of adjustment .The stiffness of the slit diaphragm flexures structure is analyzed using the elastic mechanics stress function method .The ratio of the radial stiff-ness to the axial rigidity is taken as the objective function to optimize the dimension parameters of the slit dia -phragm flexures structure .Under the condition of not exceeding the yield stress of the flexible structure materi-al, the optimal value of the stiffness ratio reaches 1573.6.A larger stiffness ratio can reduce the coupling dis-placement of the adjustment mechanism , so as to improve the guide accuracy of the mechanism .This mecha-nism is easily fabricated and assembled , and allows adjustment of three degree of freedom (θx-θy-Z ) .The stiffness of the slit diaphragm flexure is simulated and analyzed .The results show that the ratio of radial stiff-ness to axial stiffness is 1660.4, and the error between analytical value and simulation value is 5.23%, which proves the validity of the stiffness analysis method .The optimized structure has an axial adjustment stroke of 2.09 mm, an adjustment stroke of ±16.6 mrad about the x-axis deflection angle and a ±14.4 mrad deflection angle about the y-axis, which satisfies the large stroke adjustment requirement of the optical element .关键词
光刻物镜/调节机构/狭缝柔性结构/刚度比/导向精度Key words
lithographic objective/adjustment mechanism/slit diaphragm flexures/stiffness ratio/guide preci- sion分类
机械制造引用本文复制引用
董世则,郭抗,李显凌,陈华男,张德福..光学元件狭缝柔性调节机构的设计与分析[J].中国光学,2017,10(6):790-797,8.基金项目
国家科技重大专项(02专项)资助项目(No.2009ZX02205) （02专项）
国家自然科学基金资助项目(No.61504142) Supported by National Science and Technology Major Project of China ( No.2009 ZX02205 ) , National Natural Science Foundation of China (No.61504142) （No.61504142）
